Description:  This scanning electron microscope image shows a row of mirrors 60, 79, 80, and 90 microns long in its final position after being released from the substrate.
Source:  Adaptive Communications Research (ATR) Laboratories
Story:  Micromachine parts relax into place
TRN June 27, 2001
TRN Categories:  Microelectromechanical Systems; Materials Science and Engineering
Form:  Still

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